Page 32 - Vol_51

廠務季刊 Facility Journal 2023

RD 廠區空污混排改善策略與執行成效
Improvement Strategy and Implementation Effect of Mixed Air Emission in
RD Fab
文││林裕愷 黃友元│新竹廠務五部

摘要

摘要 RD Fab 先進製程研發致使製程不斷變化，2020 new
chemical 申請數較前幾年上升 71%( 全年 120 件 )，依
1. 前言
F12B 實驗運轉經驗制訂從源頭、現址式洗滌塔 (Local
1.1 研究動機 Scrubber) 至中央處理設備 (Central Scrubber)、VOC
沸石轉輪及排放監測之標準策略。透過執行該空污改善
1.2 研究之重要性
方式，F12B 廠區空污排放量由 2017 年開始逐年減量，
1.3 研究目的
到 2021 年底為止，由 132 噸 / 年→ 20 噸 / 年，已減量
2. 文獻探討 85%。
2.1 酸鹼氣體廢氣處理 關鍵詞 : 混排、Local Wet Scrubber、去除效率、污染物
分流、沸石轉輪
2.2 有機氣體廢氣處理
2.3 園區周界污染物 AS RD Fab�s research and development of advanced
manufacturing processes improved continuously.
3. 研究方法
The number of applications for new chemical in 2020
3.1 建置污染物量測機制 has increased by 71% compared with previous years
(120 for the whole year). Based on the experience of
3.2 污染源目標確認
Fab 12B�s operational experience, we formulated a
3.3 定義排放分類準則 standard strategies of air emission from the source
to the central scrubber. Through the implementation
4. 結果與分析
of this air pollution improvement method, the air
4.1 沸石轉輪對混排氣體去除效率驗證 pollution discharge of the Fab 12B plant area has been
reduced year by year since 2017, and by the end of
4.2 鹼排中「異丙醇」排放問題
2021, it has been reduced by 85% from 132 tons/year
4.3 酸排中「異丙醇」及「氨」排放問題 to 20 tons/year.
4.4 F12B 改善成果 Keywords : Local Wet Scrubber, DRE, Zeolite wheel,
mixed emissions, Emissions diversion
5. 結論

參考文獻
作者介紹

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