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廠務季刊 Facility Journal 2023

FAB6 純水脫氣系統架構升級_翻新挑戰與經驗分享
FAB6 UPW Degassing system retrofit_challenge and experience sharing

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文│古名竣 潘錦橐 │ 台南廠務一部 高雄廠務二部

摘要

摘要 超純水系統在面對「如何達成系統穩定供應」的製程挑戰時，舊廠區
首要面對的就是真空脫氣單元的翻新，在評比了早期設計的真空脫氣
1. 前言
系統 (VDG) 以及新設廠區慣用的薄膜脫氣系統 (MDG) 的優缺點後，我
2. 文獻探討 們可以得知在晶圓廠的運轉需求下將 VDG 翻新為 MDG 是必須的。
2.1 高效率真空脫氣系統 在評估了 FAB5 的翻新經驗後，我們得知最困難的部分是要在不中斷
2.2 薄膜脫氣系統 供應的情況下完成擴充系統的架構、試運轉及上線，也因此我們在進
行本次翻新時我們使用了分段潤洗、offline PLC 程式試俥等可以加
2.3 FAB 5翻新經驗借鑑
速工進以及降低投入風險的嘗試，而在成功將系統投入上線後新架構
3. 研究方法 的系統也成功能在更低風險下進行不停水保養維護以及極大的降低強
供時間。最後我們檢討本次翻新工程的缺失，發現在於電盤散熱以及
3.1 FAB 6架構及翻新設計
MD 真空系統排水設計上仍有可改進的空間。綜上經驗分享，希望能
3.2 困難點與解決方案 對於有規畫進行 VDG/MDG 翻新的廠區有所助益。

4. 結果分析 關鍵詞 : 真空脫氣系統(VDG)、薄膜脫氣系統(MDG)、全面翻新
4.1 翻新成果
When facing the process challenge of achieving a stable supply
4.2 設計巧思 in the ultra-pure water(UPW) system, the primary challenge
for the 200mm FAB facility system is the renovation of the
5. 未來展望及結論
vacuum degasification unit. After evaluating the advantages
and disadvantages of the early design vacuum degasification
參考文獻
system(VDG) and the membrane degasification system(MDG),
作者介紹 which commonly used in 300mm FAB facility system, we can
conclude that renovating VDG to MDG is necessary for the fab
operation.
Refer to the renovation experience of FAB5, we learned that the
most challenging part was to complete the expansion system
construction, test run, and tie-in without interrupting the supply.
Therefore, in this refurbishment, we tried segmental flushing,
offline PLC program testing, and other methods to accelerate
progress and reduce risks. After successfully tie-in the system,
the new system architecture could take maintenance when keep
supplying and greatly reduce the forced supply time at a lower
risk. At the end of this article, we reviewed the shortcomings of
this refurbishment project and found several improving chances
in the electrical cabinet�s heat dissipation and the MD vacuum
system�s drainage design. Based on our experience, we hope
that this sharing can be helpful for other FAB which has the
requirement to take VDG/MDG refurbishment.
Keywords : Vacuum Degasification(VDG), Membrane Degasification(MDG),
Refurbishment

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