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廠務季刊 Facility Journal 2023

化學品供酸系統備援機制管理
Management of chemical supply backup system

文│郭泓志│台南廠務三部

摘要

摘要 聯通管路長時間靜置於化學品中，伴隨著不純物析出等品質
風險，因此為確保緊急開啟聯通管路供應時不造成品質的異
1. 前言
常，本文藉 ICPMS 及 particle counter 數據解析聯通管路內
2. 文獻探討 化學品品質，最終透過化學品的 flush 達到去除不純物並經由
晶圓測試結果驗證聯通管路品質。
2.1 機台供應量能評估
2.2 化學品不純物來源 關鍵詞 : 化學品、聯通、品質

3. 實驗方法 The backup pipelines placed in chemicals for a long
time were accompanied by quality risks such as the
3.1 聯通管路化學品flush與週期
precipitation of impurities. Therefore, in order to
3.2 聯通管路化學品中金屬分析 ensure that there will be no quality abnormalities when
3.3 聯通管路化學品中Particle分析 emergency opening of backup pipeline. This article
uses ICPMS and particle counter data to analyze quality
3.4 聯通供應於晶圓測試方法
of chemicals in pipelines. Through the flushing of
chemicals to remove impurities and verify the quality of
4. 結果與分析
the pipeline through the wafer test results eventually.
4.1 聯通化學品金屬量測
Keywords : Chemical, Back up, Quality
4.2 聯通化學品particle量測
4.3 聯通開啟與線上PI RUN結果
5. 結論

參考文獻
作者介紹

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