Page 205 - 52

廠務季刊 Facility Journal 2023

新成廠化學供應系統快速驗機方法與實務
Practical Experience for a New Fab Commission of Chemical Dispense System

文│張碩修│台南廠務九部

摘要

摘要 化學品供應系統於新廠初期，通常第一波供酸是最緊迫的，
建置過程除了工程進度不足還要留意機台需求變更，以及相
1. 前言
關毒化物證照取得前也會限制原液洗酸作業，為了滿足機台
2. 文獻探討 送酸需求，需要規劃驗機程序，配合 commission team 依
標準程序作業，穩定推進 sign off 動能，在設備機台初期以
2.1 化學桶槽前處理作業
wet pa 當做驗機標準，所以系統前置 flush 不足會影響機台
2.2 化學供應系統清洗程序
驗機時間，依據 18A 與 18B 建置的經驗探討化學品系統前
處理作業，從桶槽的清洗步驟到系統盤面清潔，以及 VMB
3. 化學系統Flush標準化與驗證機制
管路 flush，排除藏污納垢的節點，提高洗桶的潔淨度與強
3.1 化學系統驗機程序
化供應品質。
3.2 化學系統驗機管控排程與調度
關鍵詞 : 驗機、Wet Pa
3.3 化學系統Flush標準化
In the early stages of a new plant, the first wave of acid
4. 結果與分析
supply is usually the most urgent. In addition to the
4.1 驗機作業與送酸結果 lack of engineering progress, the construction process
should also pay attention to the change of machine
4.2 成果歸納與未來建議
requirements. In order to meet the acid delivery needs
of the machine, it is necessary to plan the machine
5. 結論
inspection procedure. Cooperate with the commission
參考文獻 team to operate according to the standard procedures
and steadily promote the sign off kinetic energy. In
作者介紹
the early stage of the equipment machine, wet pa
is used as the machine inspection standard, so the
lack of flush in the front of the system will affect the
machine inspection time. Based on the experience of
18A and 18B construction, the pre-Handle operation of
the chemical system is discussed. From the cleaning
steps of the barrel trough to the cleaning of the system
pan, and the flushing of VMB lines. It is necessary to
remove the nodes that hide dirt and grime, improve the
cleanliness of the washing bucket and strengthen the
quality of supply.
Keywords : Commission, Wet Pa

���