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廠務季刊 Facility Journal 2023

新世代製程之水系統創新管理對策
Innovative management strategies for water systems in the new generation of
manufacturing processes
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文│郭中閔 劉家亨 鍾友維 李韋德 劉憲文 │ 台南廠務九部 先進封裝廠務處

摘要

摘要 本文累積過往新成廠經驗，水處理系統在這些過程中遇過許多挫
折但也因這些經驗，逐步強化水處理系統防禦機制，發展出一套
1. 前言
管理方法，面對快速成廠的過程中，面臨系統尚未完成建置，需
2. 文獻探討 逐步與設備協調其純水與化學品洗淨的總量管制，在不影響量產
的時程上提出雙贏的管理對策，不僅維持系統穩定運轉亦要符合
2.1 新成廠廠區UPW/PCW/
量產時程壓力的需求。本文亦探討在工程師與設備廠商新人均大
WWT運轉KPI比較
於 50% 的情況下，善用新工具 (GCMS 與 iFaxt) 防堵人為疏失
2.2 新成廠Defense機制
快速釐清問題，防堵損失擴大。
與Quality精進探討
透過探討過往經驗，站在巨人的肩膀上，結合新成廠經驗提出給
3. 研究方法 未來新建廠建議總結，期許未來新建廠區面對更複雜製程與水污
的挑戰上能夠有所借鑒。
3.1 純水大量洗淨最佳化參數
關鍵詞 : 超純水、製程冷卻水、放流水污、穩定管理對策、
3.2 使用新工具GCMS輔以機台
化學品大量洗淨、GCMS、iFaxt
化學品大量洗淨管理辦法
3.3 PCW高風險機台擬定
This passage summarizes the accumulated experiences
turn on後管理辦法
in the past new plant construction, where the water
3.4 使用新工具iFaxt管理 treatment system has faced many challenges. Through
these experiences, the system�s defense and quality
廠務系統與線上機台
mechanisms have been strengthened, and a set of
供應品質穩定度
management strategies have been innovatively developed.
In the process of rapid plant construction, when the
4. 結果與分析
system is not yet fully built, coordination with equipment
4.1 純水配合機台大量洗淨成果
is needed to control the total volume of purified water
4.2 新工具GCMS管理LSR來源 and chemical cleaning to propose win-win management
strategies without affecting the production schedule. The
異常排放案例
discussion also touches on the situation where over 50%
4.3 新工具iFaxt管理PCW
of engineers and new equipment vendors are new, and
回水壓異常案例 the use of new tools(GCMS and iFaxt) to quickly clarify
issues and effectively prevent losses from escalating due to
5. 給未來新成廠建議總結
human error. Through the exploration of past experiences
and the proposal of management strategies, the goal of
參考文獻
rapid and stable production during the new plant phase
作者介紹 in response to process changes and the need for large-
scale chemical cleaning is achieved. Standing on the
shoulders of giants, this article offers recommendations
and conclusions for future new plant construction, hoping
that future new plant areas can draw on experiences when
facing challenges of more complex processes and water
pollution.
Keywords : Ultra Pure Water, Process Cooling Water,
Discharge of Water Pollution, Stable Management Strategy,
Chemical Flush, GCMS, iFaxt

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