Page 231 - 52

廠務季刊 Facility Journal 2023

生物工藝處理 TMAH 廢水實踐分享與創新發想
Practice of Biological Process Treatment in Organic Wastewater and
Innovative Ideas
文│周嚴 趙一凡│上海廠務部

摘要

摘要 隨著溫室效應的不斷增強，碳達峰、碳中和逐漸成為全球
持續關注的話題，而作為半導體行業的領頭羊，公司也在
1. 前言
踐行 ESG 理念，極大地鼓勵並逐步建成建立環境友好型生
1.1 綠色製造與面臨之挑戰 產處理產綫。在此基礎上，上海厰通過多種小試實驗，結
1.2 TMAH的危害及處理工藝 合國內其他行業的廢水處理經驗，獨創性地采用生物處理
工藝(UASB 與 A/O 處理技術)，處理產綫排放的含 TMAH
2. 文獻探討 廢水。經實驗運維經驗纍積，該種處理工藝運行成本較低，
2.1 好氧生物處理工藝及應用案例 既能實現有毒有害廢水-TMAH的去除，又能保證處理後廢
水無害化排放與回用。
2.2 厭氧生物處理工藝及發展歷史
關鍵詞 : TMAH廢水、UASB+A/O、生物處理
3. 研究方法

3.1 TMAH水質及替代檢測方法 In pace with the greenhouse effect increasing
continuously, carbon peaks and carbon neutrality
3.2 TMAH廢水降解小試
have gradually become the topic of global concern.
3.3 小試結果總結分析 As the leader of the semiconductor industry, TSMC
has been putting the ESG concept into practice,
4. 結論與建議 greatly encouraging and gradually establishing an
4.1 TMAH廢水處理系統建立 environmentally friendly production line. On this basis,
the Shanghai factory has carried out various small-
4.2 運轉經驗分享與展望
scale experiments and combined with the experience of
wastewater treatment in other domestic industries, to
參考文獻
originally use biological treatment process(UASB and
作者介紹 A/O treatment technology) to treat TMAH-containing
wastewater discharged from the production line.
Through the accumulation of experimental operation
and maintenance experience, the operating cost of this
treatment process is relatively low. At the same time, it
can not only achieve the removal of toxic and harmful
wastewater-TMAH, but also make sure harmless
discharge and reuse of treated wastewater.
Keywords : TMAH Wastewater, UASB+A/O,
Biological Treatment

���