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廠務季刊 Facility Journal 2023

高濃廢硫酸再利用創新改良_廢硫酸稀釋法實務應用
Improving reclamation efficiency of Waste Piranha Solution

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文│林冠宇 王建翔 陳宜樂 │ 新竹廠務八部 先進封裝廠務ㄧ部

摘要

摘要 廢硫酸回收系統 (Waste Sulfuric acid recycling system) 有其
運轉規範要求，針對新建廠初期即面臨廢硫酸濃度過高、雙氧
1. 前言
水 (Hydrogen peroxide) 濃度過低之狀況，若採用現況操作
2. 文獻探討 方式_鹽酸 (Hydrochloric Acid) 催化 (Catalyst) 法，為提高反
應溫度添加過量鹽酸，不僅反應過程時間長且硫酸產品氯離子
2.1 廢硫酸來源與探討
(Chloride) 濃度高，甚至衍生操作安全疑慮，耗時又耗能。本
2.2 廢硫酸反應溫升探討
研究藉硫酸稀釋放熱 (Exothermic reaction) 特性，提供後續
雙氧水與鹽酸反應所需要之熱能，不僅縮短反應時間，大幅降
3. 實驗方法
低鹽酸用藥量，提升再利用硫酸品質穩定度，達綠色環保生產
3.1 W-H 2 SO 4 高低濃分別收集
目標。
3.2 水酸混合比例確認
關鍵詞 : 硫酸、雙氧水、鹽酸、催化、氯離子、放熱反應
3.3 放熱溫度試算
3.4 熱交換器降溫能力預估 In the early running stage of semi-conductor plant, waste
sulfuric acid is usually high concentration and comprises
4. 結果與分析 of low concentration of hydrogen peroxide. Since the
regeneration process doses large amount of hydrochloric
4.1 稀釋溫升探討
acid into the waste sulfuric acid, the whole reaction is
4.2 產酸品質探討 not only time consuming but also under great risk and
the product contains high concentration of chloride.
5. 結論 Therefore, It is difficult to implement hydrochloric acid
catalyzation in the reclamation system.
參考文獻
This study proposes using the exothermic reaction
作者介紹
characteristics of diluted sulfuric acid to provide the
necessary heat energy for the subsequent reaction
between hydrogen peroxide and hydrochloric acid. This
approach not only shortens the reaction time but also
significantly reduces the amount of hydrochloric acid
used. It improves the stability of the recycled sulfuric acid
and helps achieve green and environmentally-friendly
production goals.

Keywords : Sulfuric Acid, Hydrogen Peroxide, Hydraulic
Acid, Catalyst, Chloride, Exothermic Reaction

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