Page 16 - Vol.06

Special
Report
特別企劃

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李瑞元
文│陳誠亮
文│陳誠亮 李瑞元 洪詩雯 │ 國立台灣大學 新廠設計部│
國立台灣大學
│
新廠設計部│
洪詩雯
Innovative Green
Design of Inter-fab
Water Reuse

Networks

創新綠色廠房跨廠區回收

水網路節水構思

This article aims to develop a general mathematical formulation for integrated design of inter-fab
water networks in semiconductor industry. Based on the superstructures of all possible design options
for processing facilities, e.g. water-using units, RCW tanks, and receiving tanks, the design problem is
formulated as a mixed-integer nonlinear program (MINLP), from the bilinear terms in balance equations
and binary variables in operating constraints. The formulation can be used to apply various integration
schemes by imposing the additional constraints, and five of them are considered in the present study
with the objective to minimize the freshwater consumption. A representative example is provided to
illustrated the application of the proposed MINLP formulation.

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