Page 39 - Vol.44

TSMC / FACILITY PUBLISHED
VOL.44
廠務季刊

URL.http://nfjournal/

氣櫃閥件異常偵測應用

Application of valve abnormally detected in gas cabinet

文│陳彥儒 孫愛迪 謝銘忠│台中廠務二部│

摘要 / Abstract

特殊氣體供應系統(Special gas supply system, SGS)的穩定供應源自於氣櫃(Gas cabinet, GC)的落實管理，想要有效的管理氣
櫃就必須了解氣櫃的操作流程及氣櫃PLC的控制邏輯。亞東氣櫃依據不同的狀態定義出五種操作模式，分別為未上線供應(Off-
line)、上線供應(On-line)、吹淨(Purge)、待命供應(Standby)、手動操作(Manual)，雖然有五種操作模式，但氣櫃PLC對壓力傳
感器(Pressure Transducer, PT)的監控警報(Hi-Hi/Hi/Lo/Lo-Lo)卻只能設定單一數值；現況氣櫃PLC及SCADA的PT監控警報是依照
On-line和Standby的模式為基準設定適當的警報，在Purge模式下雖然也能設定PT監控警報，但其功能性不足，無法設定適當的
警報數值。PT作為氣櫃盤面閥件功能是否正常的主要判斷依據，若氣櫃PLC無法涵蓋所有操作模式下的PT監控，就無法確保供
應品質。
本篇文章針對PT監控問題與閥件的關係作探討，主要探討面向為 : ①鋼瓶在更換流程時的PT監控及閥件確認。②鋼瓶在待
命模式下的PT監控及閥件確認；利用SCADA Intouch軟體撰寫script程式進行客製化功能設定，在不需要修改氣櫃PLC軟體的前
提下，以PT搭配氣櫃操作模式，達到全面監控。

關鍵詞 / 氣櫃、閥件、監控、壓力傳感器

The stable supply of the special gas supply system is based on the accurate management of cabinet that can be
achieved by a full understanding of cabinet's operation process and the control logic of the PLC. Depending on different
situations, five operating modes : ①off-line mode；②on-line mode；③purge mode；④standby mode and ⑤manual
mode are defined by Air Liquid cabinet. Although five modes exist, the pressure alarm setting(Hi-Hi/Hi/Lo/Lo-Lo)of
the cabinet can only be set with a single value(see Fig.1). The current situation is that the pressure alarm of cabinet and
SCADA is set based on the on-line and standby mode. The pressure alarm can also be set in the purge mode ; however,
proper alarm value cannot be achieved due to its insufficient function. The pressure is the main basis for judging
whether the isolation valves of the cabinet panel are functioning accurately. If the pressure alarm setting of the cabinet
cannot cover the full range of pressure monitoring in all operating modes, the quality of supply cannot be ensured.
This article explores the relationship between the pressure monitoring and the isolation valves of the cabinet. The
particular questions intend to be researched include :
① The pressure monitoring and the isolation valves confirmation of cylinder in the purge mode.
② The pressure monitoring and the isolation valves confirmation of cylinder in the standby mode.
Under the premise of not modifying the software of cabinet PLC software, combining the application of SCADA software
to perform customized function settings with the cabinet operation mode with PT to achieve comprehensive monitoring.

Keywords / Gas Cabinet, Valve, Monitor, Pressure Transducer(PT)

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