Page 69 - Vol.45

TSMC / FACILITY PUBLISHED
VOL.45
廠務季刊

URL.http://nfjournal/

空污改善-煙道有害空氣污染物-砷及其化合物減量研究

Air pollution Improvement-As Emission Reduction Analysis

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文│楊映茹 鄭詠丞 │ 台南廠務四部 亞太廠務處│
摘要 / Abstract
因應環保署新增半導體煙道有害空氣汙染物排放限值，廠內離子植入使用之砷化氫經處理後產生之砷及其化合物屬於公告
物種之一，公司除需符合法規也有責任降低砷及其化合物之排放量。
解析F14B歷年煙囪檢測砷及其化合物濃度(2017-2020年)，並與法規公告方法計算之排放標準量比較，排放現況最大值僅為排
放上限量之0.12~3.82%，暫且無違法疑慮。但於2020年南科園區健康風險評估計畫採樣之濃度換算，廠內排放量仍有減量空間。
以勞工作業方法分別採樣不同年限CS250吸附桶出口及submain風管進行分析，F14B量測8組使用年限不同之CS250藥劑桶
出口，結果顯示使用近5年有機會於出口測出As濃度(2/8)。
2020年10月南科環境風險評估專案委託SGS檢測結果指出F14B煙道的砷及其化合物排放濃度偏高，盤查源頭發現廠區使用
超過4年的藥劑桶共62套，全部更換完成後於2021年3月再次檢測的結果指出煙道的砷及其化合物排放濃度有明顯下降，因此
F14B建議CS250-SC2藥劑桶更換標準，應修正為因成本管控考量延長藥劑桶之使用時間以不超過4年為上限。

關鍵詞 / 有害空氣污染物、砷化氫AsH 3 、LSC、CS250

In response to the Environmental Protection Agency's new emission limits for hazardous air pollutants from semiconductor,
Arsenic and its compounds produced by the treatment of hydrogen arsine used in implantation are one of the notified species.
In addition to complying with laws and regulations, the company is also responsible for reducing the emissions of arsenic and its
compounds.
Analysis of the emission of arsenic and its compound concentrations from F14B over the years(2017-2020), comparing with the
emission standard calculated by the method of regulation announcement, the current maximum emission status is only 0.12~3.82% of
the maximum emission limit. There is no doubt about illegality for the time being. However, in 2020, the concentration conversion of
the sampling in Tainan Science Park Health Risk Assessment project, there is still a possibility of reducing emissions within the plant.
The outlets of CS250 adsorption buckets of different years and submain ducts were sampled for analysis by labor operation
methods. F14B measured 8 sets of CS250 adsorption buckets outlets with different ages. The results showed that the As concentration
was measured at the outlet after nearly 5 years of use(2/8). In October 2020, Tainan Science Park Health Risk Assessment project
commissioned SGS to test results indicating that the emission concentration of arsenic and its compounds in the F14B is high. After
investigating the source, it was found that there were 62 sets of adsorption buckets in the factory that had been in use for more than
4 years. After all the replacements were completed, the results of the re-test in March 2021 indicated that the emission concentration
of arsenic and its compounds in the flue has dropped significantly. Therefore, F14B recommends CS250-SC2 adsorption bucket
replacement standard, which should be revised to extend the use time of the adsorption bucket to no more than 4 years due to cost
control considerations.

Keywords / Hazardous Air Pollutants, AsH 3 , LSC, CS250

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