Page 98 - Vol_51

廠務季刊 Facility Journal 2023

南京廠含砷廢氣的監管技術的發展與研究
Development and research on monitoring technology of arsenic-containing
waste gas in Nanjing Factory
文││張波│南京廠務部

摘要

摘要 含砷廢氣作為劇毒性氣體，在大陸環保管制被從嚴要
求，監管手段除了常規的煙囪出口量測，更趨向于源頭
1. 前言
管控。本文因應法規要求，於前端現址式處理裝置出口
2. 文獻探討 設置單獨風管收集，並設立標準檢測口進行標準化採樣
檢測，在廢氣進入主管段之前進行有效監管。同時拓展
2.1 砷的特性與危害
檢測儀器，借助傅立葉轉換紅外光譜技術 (FTIR) 進行量
2.2 生產工藝產生含砷廢棄物環節 測，利用直讀儀器可縮短檢測時間，提升異常排放時溯
2.3 砷化物相關管制標準 源反應速度。該風管設計及量測模型可為後續大陸半導
體含砷風管設計提供參考依據。
2.4 檢測方法比較
關鍵詞 : 空污檢測、砷、傅立葉轉換紅外光譜
2.5 FTIR 污染檢測應用實例
3. 研究方法 As a highly toxic gas, arsenic-containing waste gas is
strictly controlled in the mainland�s environmental
3.1 分析儀器及采樣設備
protection control. In addition to conventional
3.2 采樣模型設計 chimney outlet measurement, regulatory measures
tend to focus on source control. In response to
4. 結果與分析
regulatory requirements, a separate air duct is
4.1 準確性測試 installed at the outlet of the local scrubber to
collect, and a standard inspection port is opened for
4.2 LSC 實際 DRE 效果
standardized sampling inspection. At the same time,
4.3 量測模型改善 Fourier transform infrared spectroscopy(FTIR) is used
for measurement. The direct-reading instrument
5. 結論
can shorten the detection time and improve the
traceability response speed of abnormal emission.
參考文獻
The air duct measurement model can provide a
作者介紹 reference for the subsequent design of Continental
Semiconductor�s arsenic-containing air duct.
Keywords : Air pollution detection, Arsenic,
Fourier-transform infrared spectroscopy

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