Discussion of the ability of Salix to capture ammonium salt droplets and the outlook of VOCs flow at Polymer/PR Stripping process.
Salix應用於Polymer/PR Stripping之銨鹽類霧滴捕捉能力提升與VOCs流向展望
Polymer/PR Stripping 濕製程使用Wet Bench常見的高溫硫酸(SPM)與NH4OH，並同時利用IPA洗滌Wafer表面，故在製程尾氣處理具有酸性氣體與有機物(VOCs)...
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