Purge FOUP AMC Chelating with Chilling Impinger Sampling Technique for N16 Generation
16奈米世代晶圓傳送盒吹淨微污染耦合冷凝取樣新式技術
16奈米與20奈米之量產製程，廣泛應用具吹淨功能的晶圓傳送盒 FOUP(Front Opening Unified Pod)內。然因FOUP內可供採集的容積限制與其內含之污染濃度極其微量，故甚難就晶圓於FOUP內部...
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